ISO 23131:2021
ISO 23131:2021 Ellipsometry – Principles
CDN $186.00
Description
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
Edition
1
Published Date
2021-04-22
Status
PUBLISHED
Pages
15
Language
English
Format
Secure PDF
Secure – PDF details
- Save your file locally or view it via a web viewer
- Viewing permissions are restricted exclusively to the purchaser
- Device limits - 3
- Printing – Enabled only to print (1) copy
See more about our Environmental Commitment
Abstract
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
Previous Editions
Can’t find what you are looking for?
Please contact us at:
Related Documents
-
ISO 14416:2003 Information and documentation – Requirements for binding of books, periodicals, serials and other paper documents for archive and library use – Methods and materials
CDN $295.00 Add to cart -
ISO 5053:2019 Industrial trucks – Vocabulary – Part 2: Fork arms and attachments
CDN $379.00 Add to cart -
ISO 10110:2019 Optics and photonics – Preparation of drawings for optical elements and systems – Part 1: General
CDN $336.00 Add to cart -
ISO 80004:2020 Nanotechnologies – Vocabulary – Part 3: Carbon nano-objects
CDN $82.00 Add to cart
