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B51-14 (R2019) – Boiler, pressure vessel, and pressure piping code

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ISO 25178:2025

ISO 25178:2025 Geometrical product specifications (GPS) – Surface texture: Areal – Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments

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Description

This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.

Edition

2

Published Date

2025-02-14

Status

PUBLISHED

Pages

23

Language Detail Icon

English

Format Secure Icon

Secure PDF

Abstract

This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.

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