ISO 23216:2021
ISO 23216:2021 Carbon based films – Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
CDN $129.00
Description
This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n–k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.
Edition
1
Published Date
2021-05-04
Status
PUBLISHED
Pages
7
Language
English
Format
Secure PDF
Secure – PDF details
- Save your file locally or view it via a web viewer
- Viewing permissions are restricted exclusively to the purchaser
- Device limits - 3
- Printing – Enabled only to print (1) copy
See more about our Environmental Commitment
Abstract
This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.
Previous Editions
Can’t find what you are looking for?
Please contact us at:
Related Documents
-
ISO 16840:2006 Wheelchair seating – Part 1: Vocabulary, reference axis convention and measures for body segments, posture and postural support surfaces
CDN $391.00 Add to cart -
ISO 80004:2011 Nanotechnologies – Vocabulary – Part 5: Nano/bio interface
CDN $85.00 Add to cart -
ISO 8927:1991 Earth-moving machinery – Machine availability – Vocabulary
CDN $259.00 Add to cart -
ISO 80000:2025 Quantities and units – Part 13: Information science and technology
CDN $221.00 Add to cart
