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B51-14 (R2019) – Boiler, pressure vessel, and pressure piping code

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ISO 21383:2021

ISO 21383:2021 Microbeam analysis – Scanning electron microscopy – Qualification of the scanning electron microscope for quantitative measurements

CDN $391.00

SKU: 729bd437562c Category:

Description

This document describes methods to qualify the scanning electron microscope with the digital imaging system for quantitative and qualitative SEM measurements by evaluating essential scanning electron microscope performance parameters to maintain the performance after installation of the instruments. The items and evaluating methods of the performance parameters are selected by users for their own purposes.

Edition

1

Published Date

2021-03-12

Status

PUBLISHED

Pages

59

Language Detail Icon

English

Format Secure Icon

Secure PDF

Abstract

This document describes methods to qualify the scanning electron microscope with the digital imaging system for quantitative and qualitative SEM measurements by evaluating essential scanning electron microscope performance parameters to maintain the performance after installation of the instruments. The items and evaluating methods of the performance parameters are selected by users for their own purposes.

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