ISO 23131-3:2026
ISO 23131-3:2026 Ellipsometry — Part 3: Transparent single layer model
CDN $296.00
This publication was last reviewed and confirmed in 2026.
Ellipsometry — Part 3: Transparent single layer model
Description
This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.
Edition
1
Published Date
2026-06-18
Status
PUBLISHED
Pages
29
Language
English
Format
Secure PDF
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Abstract
This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.
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