ISO/TR 23247-100:2025
ISO/TR 23247-100:2025 Automation systems and integration — Digital twin framework for manufacturing — Part 100: Use case on management of semiconductor ingot growth process
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This publication was last reviewed and confirmed in 2025.
Automation systems and integration — Digital twin framework for manufacturing — Part 100: Use case on management of semiconductor ingot growth process
Description
This document describes a digital twin for monitoring and controlling the semiconductor ingot growth process. The use case is analysed and designed using the ISO 23247 series. The result is a systematic view of the use case implementation and a high-level design of the digital twins, which can be directly implemented using the readily available tools and languages, including those supported by the relevant standards.
Edition
1
Published Date
2026-06-19
Status
PUBLISHED
Pages
15
Language
English
Format
Secure PDF
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Abstract
This document describes a digital twin for monitoring and controlling the semiconductor ingot growth process. The use case is analysed and designed using the ISO 23247 series. The result is a systematic view of the use case implementation and a high-level design of the digital twins, which can be directly implemented using the readily available tools and languages, including those supported by the relevant standards.
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