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ISO 14644-15:2026

ISO 14644-15:2026 Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration

CDN $251.00

This publication was last reviewed and confirmed in 2026.

Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration

SKU: 80e58ab59931 Categories: ,

Description

This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO 14644-8).

This document does not apply to the following:

  • health and safety requirements;
  • compatibility with cleaning agents and techniques;
  • cleanability;
  • biocontamination;
  • specific requirements of equipment and materials for processes and products;
  • design details of equipment.
Edition

2

Published Date

2026-06-19

Status

PUBLISHED

Pages

19

Language Detail Icon

English

Format Secure Icon

Secure PDF

Abstract

This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO 14644-8).

This document does not apply to the following:

  • health and safety requirements;
  • compatibility with cleaning agents and techniques;
  • cleanability;
  • biocontamination;
  • specific requirements of equipment and materials for processes and products;
  • design details of equipment.

Previous Editions

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