ISO 19606:2024
ISO 19606:2024 Fine ceramics (advanced ceramics, advanced technical ceramics) – Test method for surface roughness of fine ceramic films by atomic force microscopy
CDN $261.00
Description
This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, Rsm, in the range of about 0,04 μm to 2,5 μm.
Edition
2
Published Date
2024-11-01
Status
PUBLISHED
Pages
24
Language
English
Format
Secure PDF
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Abstract
This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, Rsm, in the range of about 0,04 μm to 2,5 μm.
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