ISO 20146:2019
ISO 20146:2019 Vacuum technology – Vacuum gauges – Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges
CDN $186.00
Description
This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.
This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.
Edition
1
Published Date
2019-01-31
Status
PUBLISHED
Pages
16
Language
English
Format
Secure PDF
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Abstract
This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.
This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.
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