ISO 21360:2023
ISO 21360:2023 Vacuum technology – Standard methods for measuring vacuum-pump performance – Part 5: Non-evaporable getter (NEG) vacuum pumps
CDN $305.00
Description
This document specifies methods for the measurement of pumping characteristics of non-evaporable getters (NEGs). It is applicable to all sizes and all types of NEGs, including those:
–¬†¬†¬† with the shape of pill, disk, ring, strip, module, cartridge;
–¬†¬†¬† with pump structures;
–¬†¬†¬† and NEG coatings on inner surface of pipes and vacuum chamber.
A significant difference of pumping characteristics of the NEG and other vacuum pumps is that the pumping speed of the NEG depends on the sorption quantity. Furthermore, especially in the case of NEG coating, the sticking probability rather than the pumping speed is often the index of the pumping performance. Therefore, this document specifies the methods for measuring the pumping speed, the sorption quantity, and the sticking probability of NEGs.
WARNING    It is assumed that the user is familiar with the handling of combustible gases and poisonous ones and with ultra-high vacuum technology.
Edition
1
Published Date
2023-11-28
Status
PUBLISHED
Pages
27
Language
English
Format
Secure PDF
Secure – PDF details
- Save your file locally or view it via a web viewer
- Viewing permissions are restricted exclusively to the purchaser
- Device limits - 3
- Printing – Enabled only to print (1) copy
See more about our Environmental Commitment
Abstract
This document specifies methods for the measurement of pumping characteristics of non-evaporable getters (NEGs). It is applicable to all sizes and all types of NEGs, including those:
-    with the shape of pill, disk, ring, strip, module, cartridge;
-    with pump structures;
-    and NEG coatings on inner surface of pipes and vacuum chamber.
A significant difference of pumping characteristics of the NEG and other vacuum pumps is that the pumping speed of the NEG depends on the sorption quantity. Furthermore, especially in the case of NEG coating, the sticking probability rather than the pumping speed is often the index of the pumping performance. Therefore, this document specifies the methods for measuring the pumping speed, the sorption quantity, and the sticking probability of NEGs.
WARNING    It is assumed that the user is familiar with the handling of combustible gases and poisonous ones and with ultra-high vacuum technology.
Previous Editions
Can’t find what you are looking for?
Please contact us at:
Related Documents
-
ISO 20537:2025 Footwear – Identification of defects during visual inspection – Vocabulary
CDN $305.00 Add to cart -
ISO 8384:2019 Ships and marine technology – Dredgers – Vocabulary
CDN $85.00 Add to cart -
ISO 80004:2020 Nanotechnologies – Vocabulary – Part 8: Nanomanufacturing processes
CDN $85.00 Add to cart -
ISO 5053:2019 Industrial trucks – Vocabulary – Part 2: Fork arms and attachments
CDN $391.00 Add to cart
