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ISO 21360:2023

ISO 21360:2023 Vacuum technology – Standard methods for measuring vacuum-pump performance – Part 6: Cryogenic vacuum pumps

CDN $115.00

Description

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.

It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

Edition

1

Published Date

2023-12-06

Status

PUBLISHED

Pages

12

Language Detail Icon

English

Format Secure Icon

Secure PDF

Abstract

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.

It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

Previous Editions

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