ISO 21360:2023
ISO 21360:2023 Vacuum technology – Standard methods for measuring vacuum-pump performance – Part 6: Cryogenic vacuum pumps
CDN $131.00
Description
This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.
It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.
Edition
1
Published Date
2023-12-06
Status
PUBLISHED
Pages
12
Language
English
Format
Secure PDF
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Abstract
This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.
It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.
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