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B51-14 (R2019) – Boiler, pressure vessel, and pressure piping code

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ISO 22278:2020

ISO 22278:2020 Fine ceramics (advanced ceramics, advanced technical ceramics) – Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

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Description

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

Edition

1

Published Date

2020-08-24

Status

PUBLISHED

Pages

29

Language Detail Icon

English

Format Secure Icon

Secure PDF

Abstract

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

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