ISO 22278:2020
ISO 22278:2020 Fine ceramics (advanced ceramics, advanced technical ceramics) – Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
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Description
This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.
Edition
1
Published Date
2020-08-24
Status
PUBLISHED
Pages
29
Language
English
Format
Secure PDF
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Abstract
This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.
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