ISO 23131:2021
ISO 23131:2021 Ellipsometry – Principles
CDN $173.00
Description
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
Edition
1
Published Date
2021-04-22
Status
PUBLISHED
Pages
15
Language
English
Format
Secure PDF
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Abstract
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
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