ISO 24639:2022
ISO 24639:2022 Microbeam analysis – Analytical electron microscopy – Calibration procedure of energy scale for elemental analysis by electron energy loss spectroscopy
CDN $192.00
Description
This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV.
This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.
Edition
1
Published Date
2022-07-05
Status
PUBLISHED
Pages
15
Language
English
Format
Secure PDF
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Abstract
This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV.
This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.
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