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ISO 25178:2025
ISO 25178:2025 Geometrical product specifications (GPS) – Surface texture: Areal – Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
CDN $173.00
Description
This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
Edition
2
Published Date
2025-02-14
Status
PUBLISHED
Pages
18
Language
English
Format
Secure PDF
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Abstract
This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
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