ISO 25178:2025
ISO 25178:2025 Geometrical product specifications (GPS) – Surface texture: Areal – Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
CDN $233.00
Description
This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.
Edition
2
Published Date
2025-02-14
Status
PUBLISHED
Pages
23
Language
English
Format
Secure PDF
Secure – PDF details
- Save your file locally or view it via a web viewer
- Viewing permissions are restricted exclusively to the purchaser
- Device limits - 3
- Printing – Enabled only to print (1) copy
See more about our Environmental Commitment
Abstract
This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.
Previous Editions
Can’t find what you are looking for?
Please contact us at:
Related Documents
-
ISO 16610:2025 Geometrical product specifications (GPS) – Filtration – Part 31: Robust profile filters: Gaussian regression filters
CDN $233.00 Add to cart -
ISO 12181:2011 Geometrical product specifications (GPS) – Roundness – Part 1: Vocabulary and parameters of roundness
CDN $173.00 Add to cart -
ISO 16610:2025 Geometrical product specifications (GPS) – Filtration – Part 21: Linear profile filters: Gaussian filters
CDN $273.00 Add to cart -
ISO 16610:2023 Geometrical product specifications (GPS) – Filtration – Part 32: Robust profile filters: Spline filters
CDN $173.00 Add to cart
