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“ISO 25178:2025 Geometrical product specifications (GPS) – Surface texture: Areal – Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments” has been added to your cart. View cart

ISO 25178:2025
ISO 25178:2025 Geometrical product specifications (GPS) – Surface texture: Areal – Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
CDN $233.00
SKU: c6bc12c2dd6a
Category: ICS:17.040.20
Description
This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.
Edition
2
Published Date
2025-02-14
Status
PUBLISHED
Pages
23
Format 
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Abstract
This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.
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