ISO 25178:2019
ISO 25178:2019 Geometrical product specifications (GPS) – Surface texture: Areal – Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments
CDN $233.00
Description
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
Edition
1
Published Date
2019-03-05
Status
PUBLISHED
Pages
21
Language
English
Format
Secure PDF
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Abstract
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
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