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B51-14 (R2019) – Boiler, pressure vessel, and pressure piping code

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ISO 5618:2024

ISO 5618:2024 Fine ceramics (advanced ceramics, advanced technical ceramics) – Test method for GaN crystal surface defects – Part 2: Method for determining etch pit density

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Description

This document describes a method for determining the etch pit density, which is used to detect dislocations and processing-introduced defects that occur on single-crystal GaN substrates or single-crystal GaN films.

It is applicable to the defects specified in ISO 5618-1 from among the defects exposed on the surface of the following types of GaN substrates or films: single-crystal GaN substrate; single-crystal GaN film formed by homoepitaxial growth on a single-crystal GaN substrate; or single-crystal GaN film formed by heteroepitaxial growth on a single-crystal Al2O3, SiC, or Si substrate.

It is applicable to defects with an etch pit density of ≤ 7 × 107 cm-2.

Edition

1

Published Date

2024-04-30

Status

PUBLISHED

Pages

25

Language Detail Icon

English

Format Secure Icon

Secure PDF

Abstract

This document describes a method for determining the etch pit density, which is used to detect dislocations and processing-introduced defects that occur on single-crystal GaN substrates or single-crystal GaN films.

It is applicable to the defects specified in ISO 5618-1 from among the defects exposed on the surface of the following types of GaN substrates or films: single-crystal GaN substrate; single-crystal GaN film formed by homoepitaxial growth on a single-crystal GaN substrate; or single-crystal GaN film formed by heteroepitaxial growth on a single-crystal Al2O3, SiC, or Si substrate.

It is applicable to defects with an etch pit density of ≤ 7 × 107 cm-2.

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