ISO 8181:2023
ISO 8181:2023 Atomic layer deposition – Vocabulary
CDN $86.00
Description
This document defines general terms and film growth processes for atomic layer deposition (ALD). ALD technique is classified into conventional time separated ALD and spatial ALD according to the separation between sequential surface reactions of precursors on substrate. Besides planar substrate, ALD can be used for coating on micro-nano particles, which is developed as powder ALD. Some energy enhanced ALD techniques are also included. This document specifies the processes of different ALD methods.
This document applies to the process of ALD. This document does not apply to the deposited materials or specific nanostructures.
This document applies to industrial production, scientific research, teaching, publishing and scientific and technological communications related to ALD.
Edition
1
Published Date
2023-10-16
Status
PUBLISHED
Pages
10
Language
English
Format
Secure PDF
Secure – PDF details
- Save your file locally or view it via a web viewer
- Viewing permissions are restricted exclusively to the purchaser
- Device limits - 3
- Printing – Enabled only to print (1) copy
See more about our Environmental Commitment
Abstract
This document defines general terms and film growth processes for atomic layer deposition (ALD). ALD technique is classified into conventional time separated ALD and spatial ALD according to the separation between sequential surface reactions of precursors on substrate. Besides planar substrate, ALD can be used for coating on micro-nano particles, which is developed as powder ALD. Some energy enhanced ALD techniques are also included. This document specifies the processes of different ALD methods.
This document applies to the process of ALD. This document does not apply to the deposited materials or specific nanostructures.
This document applies to industrial production, scientific research, teaching, publishing and scientific and technological communications related to ALD.
Previous Editions
Can’t find what you are looking for?
Please contact us at:
Related Documents
-
ISO 80000:2025 Quantities and units – Part 13: Information science and technology
CDN $224.00 Add to cart -
ISO 5053:2019 Industrial trucks – Vocabulary – Part 2: Fork arms and attachments
CDN $397.00 Add to cart -
ISO 80004:2021 Nanotechnologies – Vocabulary – Part 6: Nano-object characterization
CDN $86.00 Add to cart -
ISO 3833:1977 Road vehicles – Types – Terms and definitions
CDN $131.00 Add to cart
