ISO 25178-606:2026
ISO 25178-606:2026 Geometrical product specifications (GPS) — Surface texture: Areal — Part 606: Design and characteristics of non-contact (focus variation) instruments
CDN $251.00
This publication was last reviewed and confirmed in 2026.
Geometrical product specifications (GPS) — Surface texture: Areal — Part 606: Design and characteristics of non-contact (focus variation) instruments
Description
This document specifies the design and characteristics of focus variation instruments for areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements as well.
This document applies to focus variation without pattern illumination or with fixed pattern illumination. This document does not cover methods using varying pattern illumination during the measurement.
Edition
2
Published Date
2026-06-19
Status
PUBLISHED
Pages
19
Language
English
Format
Secure PDF
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Abstract
This document specifies the design and characteristics of focus variation instruments for areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements as well.
This document applies to focus variation without pattern illumination or with fixed pattern illumination. This document does not cover methods using varying pattern illumination during the measurement.
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