ISO 20341:2003
ISO 20341:2003 Surface chemical analysis – Secondary-ion mass spectrometry – Method for estimating depth resolution parameters with multiple delta-layer reference materials
CDN $85.00
Description
ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.
It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.
Edition
1
Published Date
2003-07-24
Status
PUBLISHED
Pages
5
Language
English
Format
Secure PDF
Secure – PDF details
- Save your file locally or view it via a web viewer
- Viewing permissions are restricted exclusively to the purchaser
- Device limits - 3
- Printing – Enabled only to print (1) copy
See more about our Environmental Commitment
Abstract
ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.
It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.
Previous Editions
Can’t find what you are looking for?
Please contact us at:
Related Documents
-
ISO 2382:2015 Information technology – Vocabulary
CDN $0.00 Add to cart -
ISO 80000:2025 Quantities and units – Part 13: Information science and technology
CDN $221.00 Add to cart -
ISO 80004:2011 Nanotechnologies – Vocabulary – Part 7: Diagnostics and therapeutics for healthcare
CDN $129.00 Add to cart -
ISO 3833:1977 Road vehicles – Types – Terms and definitions
CDN $129.00 Add to cart
