ISO 20341:2003
ISO 20341:2003 Surface chemical analysis – Secondary-ion mass spectrometry – Method for estimating depth resolution parameters with multiple delta-layer reference materials
CDN $85.00
Description
ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.
It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.
Edition
1
Published Date
2003-07-24
Status
PUBLISHED
Pages
5
Language
English
Format
Secure PDF
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Abstract
ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.
It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.
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