ISO 16531:2020
ISO 16531:2020 Surface chemical analysis – Depth profiling – Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS
CDN $263.00
Description
This document specifies methods for the alignment of the ion beam to ensure good depth resolution in sputter depth profiling and optimal cleaning of surfaces when using inert gas ions in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS). These methods are of two types: one involves a Faraday cup to measure the ion current; the other involves imaging methods. The Faraday cup method also specifies the measurements of current density and current distributions in ion beams. The methods are applicable for ion guns with beams with a spot size less than or equal to 1 mm in diameter. The methods do not include depth resolution optimization.
Edition
2
Published Date
2020-10-05
Status
PUBLISHED
Pages
19
Language
English
Format
Secure PDF
Secure – PDF details
- Save your file locally or view it via a web viewer
- Viewing permissions are restricted exclusively to the purchaser
- Device limits - 3
- Printing – Enabled only to print (1) copy
See more about our Environmental Commitment
Abstract
This document specifies methods for the alignment of the ion beam to ensure good depth resolution in sputter depth profiling and optimal cleaning of surfaces when using inert gas ions in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS). These methods are of two types: one involves a Faraday cup to measure the ion current; the other involves imaging methods. The Faraday cup method also specifies the measurements of current density and current distributions in ion beams. The methods are applicable for ion guns with beams with a spot size less than or equal to 1 mm in diameter. The methods do not include depth resolution optimization.
Previous Editions
Can’t find what you are looking for?
Please contact us at:
Related Documents
-
ISO 5053:2019 Industrial trucks – Vocabulary – Part 2: Fork arms and attachments
CDN $397.00 Add to cart -
ISO 16840:2006 Wheelchair seating – Part 1: Vocabulary, reference axis convention and measures for body segments, posture and postural support surfaces
CDN $397.00 Add to cart -
ISO 14416:2003 Information and documentation – Requirements for binding of books, periodicals, serials and other paper documents for archive and library use – Methods and materials
CDN $310.00 Add to cart -
ISO 20537:2025 Footwear – Identification of defects during visual inspection – Vocabulary
CDN $310.00 Add to cart
