ISO 22933:2022
ISO 22933:2022 Surface chemical analysis – Secondary ion mass spectrometry – Method for the measurement of mass resolution in SIMS
CDN $173.00
Description
This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.
Edition
1
Published Date
2022-04-01
Status
PUBLISHED
Pages
15
Language
English
Format
Secure PDF
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Abstract
This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.
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