
ISO 12406:2010
ISO 12406:2010 Surface chemical analysis – Secondary-ion mass spectrometry – Method for depth profiling of arsenic in silicon
CDN $192.00
Description
ISO 12406:2010 specifies a secondary-ion mass spectrometric method using magnetic-sector or quadrupole mass spectrometers for depth profiling of arsenic in silicon, and using stylus profilometry or optical interferometry for depth calibration. This method is applicable to single-crystal, poly-crystal or amorphous silicon specimens with arsenic atomic concentrations between 1 x 1016 atoms/cm3 and 2,5 x 1021 atoms/cm3, and to crater depths of 50 nm or deeper.
Edition
1
Published Date
2010-11-08
Status
PUBLISHED
Pages
13
Format 
Secure PDF
Secure – PDF details
- Save your file locally or view it via a web viewer
- Viewing permissions are restricted exclusively to the purchaser
- Device limits - 3
- Printing – Enabled only to print (1) copy
See more about our Environmental Commitment
Abstract
ISO 12406:2010 specifies a secondary-ion mass spectrometric method using magnetic-sector or quadrupole mass spectrometers for depth profiling of arsenic in silicon, and using stylus profilometry or optical interferometry for depth calibration. This method is applicable to single-crystal, poly-crystal or amorphous silicon specimens with arsenic atomic concentrations between 1 x 1016 atoms/cm3 and 2,5 x 1021 atoms/cm3, and to crater depths of 50 nm or deeper.
Previous Editions
Can’t find what you are looking for?
Please contact us at:
Related Documents
-

ISO 10110:2019 Optics and photonics – Preparation of drawings for optical elements and systems – Part 1: General
CDN $347.00 Add to cart -

ISO 16520:2025 Tourism and related services – Restaurants and catering – Vocabulary
CDN $192.00 Add to cart -

ISO 20537:2025 Footwear – Identification of defects during visual inspection – Vocabulary
CDN $303.00 Add to cart -

ISO 14416:2003 Information and documentation – Requirements for binding of books, periodicals, serials and other paper documents for archive and library use – Methods and materials
CDN $305.00 Add to cart







