ISO 27911:2011
ISO 27911:2011 Surface chemical analysis – Scanning-probe microscopy – Definition and calibration of the lateral resolution of a near-field optical microscope
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Description
ISO 27911:2011 describes a method for determining the spatial (lateral) resolution of an apertured near-field scanning optical microscope (NSOM) by imaging an object with a size much smaller than the expected resolution. It is applicable to aperture-type NSOMs operated in the transmission, reflection, collection or illumination/collection mode.
Edition
1
Published Date
2011-07-21
Status
PUBLISHED
Pages
18
Language
English
Format
Secure PDF
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Abstract
ISO 27911:2011 describes a method for determining the spatial (lateral) resolution of an apertured near-field scanning optical microscope (NSOM) by imaging an object with a size much smaller than the expected resolution. It is applicable to aperture-type NSOMs operated in the transmission, reflection, collection or illumination/collection mode.
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