
ISO 16666:2025
ISO 16666:2025 Surface chemical analysis — Total reflection X-ray fluorescence — Principles and general requirements
CDN $251.00
This publication was last reviewed and confirmed in 2025.
Surface chemical analysis — Total reflection X-ray fluorescence — Principles and general requirements
Description
The document provides the physical principles and specifies instrumental requirements for total reflection X‑ray fluorescence analysis (TXRF) spectrometers. This document specifies general procedures for calibration, method development and verification of TXRF measurements and quality control.
The document describes measurements with TXRF conditions having a fixed glancing angle below the critical angle of total reflection and considerably enhanced excitation radiation intensity. Although certain definitions of grazing incidence geometry are shown for clarification, this document is not applicable to measurement setups working under such conditions.
Edition
1
Published Date
2026-06-19
Status
PUBLISHED
Pages
22
Format 
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Abstract
The document provides the physical principles and specifies instrumental requirements for total reflection X‑ray fluorescence analysis (TXRF) spectrometers. This document specifies general procedures for calibration, method development and verification of TXRF measurements and quality control.
The document describes measurements with TXRF conditions having a fixed glancing angle below the critical angle of total reflection and considerably enhanced excitation radiation intensity. Although certain definitions of grazing incidence geometry are shown for clarification, this document is not applicable to measurement setups working under such conditions.
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