ISO 13083:2015
ISO 13083:2015 Surface chemical analysis – Scanning probe microscopy – Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
CDN $173.00
Description
ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.
Edition
1
Published Date
2015-08-20
Status
PUBLISHED
Pages
14
Language
English
Format
Secure PDF
Secure – PDF details
- Save your file locally or view it via a web viewer
- Viewing permissions are restricted exclusively to the purchaser
- Device limits - 3
- Printing – Enabled only to print (1) copy
See more about our Environmental Commitment
Abstract
ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.
Previous Editions
Can’t find what you are looking for?
Please contact us at:
Related Documents
-
ISO 5053:2019 Industrial trucks – Vocabulary – Part 2: Fork arms and attachments
CDN $351.00 Add to cart -
ISO 80004:2011 Nanotechnologies – Vocabulary – Part 7: Diagnostics and therapeutics for healthcare
CDN $115.00 Add to cart -
ISO 4006:1991 Measurement of fluid flow in closed conduits – Vocabulary and symbols
CDN $351.00 Add to cart -
ISO 22553:2019 Paints and varnishes – Electro-deposition coatings – Part 1: Vocabulary
CDN $76.00 Add to cart
