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B51-14 (R2019) – Boiler, pressure vessel, and pressure piping code

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ISO 13424:2013

ISO 13424:2013 Surface chemical analysis – X-ray photoelectron spectroscopy – Reporting of results of thin-film analysis

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Description

ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.

Edition

1

Published Date

2013-09-23

Status

PUBLISHED

Pages

46

Language Detail Icon

English

Format Secure Icon

Secure PDF

Abstract

ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.

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