ISO 14706:2014
ISO 14706:2014 Surface chemical analysis – Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
CDN $263.00
Description
ISO 14706:2014 specifies a TXRF method for the measurement of the atomic surface density of elemental contamination on chemomechanically polished or epitaxial silicon wafer surfaces. The method is applicable to the following: elements of atomic number from 16 (S) to 92 (U); contamination elements with atomic surface densities from 1 √ó 1010 atoms/cm2 to 1 √ó 1014 atoms/cm2; contamination elements with atomic surface densities from 5 √ó 108 atoms/cm2 to 5 √ó 1012 atoms/cm2 using a VPD (vapour-phase decomposition) specimen preparation method.
Edition
2
Published Date
2014-07-25
Status
PUBLISHED
Pages
25
Language
English
Format
Secure PDF
Secure – PDF details
- Save your file locally or view it via a web viewer
- Viewing permissions are restricted exclusively to the purchaser
- Device limits - 3
- Printing – Enabled only to print (1) copy
See more about our Environmental Commitment
Abstract
ISO 14706:2014 specifies a TXRF method for the measurement of the atomic surface density of elemental contamination on chemomechanically polished or epitaxial silicon wafer surfaces. The method is applicable to the following: elements of atomic number from 16 (S) to 92 (U); contamination elements with atomic surface densities from 1 √ó 1010 atoms/cm2 to 1 √ó 1014 atoms/cm2; contamination elements with atomic surface densities from 5 √ó 108 atoms/cm2 to 5 √ó 1012 atoms/cm2 using a VPD (vapour-phase decomposition) specimen preparation method.
Previous Editions
Can’t find what you are looking for?
Please contact us at:
Related Documents
-
ISO 2574:1994 Aircraft – Electrical cables – Identification marking
CDN $131.00 Add to cart -
ISO 2382:2015 Information technology – Vocabulary
CDN $0.00 Add to cart -
ISO 4006:1991 Measurement of fluid flow in closed conduits – Vocabulary and symbols
CDN $397.00 Add to cart -
ISO 16520:2025 Tourism and related services – Restaurants and catering – Vocabulary
CDN $195.00 Add to cart
