ISO 18114:2021
ISO 18114:2021 Surface chemical analysis – Secondary-ion mass spectrometry – Determination of relative sensitivity factors from ion-implanted reference materials
CDN $82.00
Description
This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.
The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.
Edition
2
Published Date
2021-05-11
Status
PUBLISHED
Pages
4
Language
English
Format
Secure PDF
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Abstract
This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.
The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.
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