ISO 22415:2019
ISO 22415:2019 Surface chemical analysis – Secondary ion mass spectrometry – Method for determining yield volume in argon cluster sputter depth profiling of organic materials
CDN $305.00
Description
This document specifies a method for measuring and reporting argon cluster sputtering yield volumes of a specific organic material. The method requires one or more test samples of the specified material as a thin, uniform film of known thickness between 50 and 1 000 nanometres on a flat substrate which has a different chemical composition to the specified material. This document is applicable to test samples in which the specified material layer has homogeneous composition in depth and is not applicable if the depth distribution of compounds in the specified material is inhomogeneous. This document is applicable to instruments in which the sputtering ion beam irradiates the sample using a raster to ensure a constant ion dose over the analysis area.
Edition
1
Published Date
2019-05-10
Status
PUBLISHED
Pages
30
Language
English
Format
Secure PDF
Secure – PDF details
- Save your file locally or view it via a web viewer
- Viewing permissions are restricted exclusively to the purchaser
- Device limits - 3
- Printing – Enabled only to print (1) copy
See more about our Environmental Commitment
Abstract
This document specifies a method for measuring and reporting argon cluster sputtering yield volumes of a specific organic material. The method requires one or more test samples of the specified material as a thin, uniform film of known thickness between 50 and 1 000 nanometres on a flat substrate which has a different chemical composition to the specified material. This document is applicable to test samples in which the specified material layer has homogeneous composition in depth and is not applicable if the depth distribution of compounds in the specified material is inhomogeneous. This document is applicable to instruments in which the sputtering ion beam irradiates the sample using a raster to ensure a constant ion dose over the analysis area.
Previous Editions
Can’t find what you are looking for?
Please contact us at:
Related Documents
-
ISO 612:1978 Road vehicles – Dimensions of motor vehicles and towed vehicles – Terms and definitions
CDN $192.00 Add to cart -
ISO 80000:2019 Quantities and units – Part 11: Characteristic numbers
CDN $347.00 Add to cart -
ISO 15424:2025 Information technology – Automatic identification and data capture techniques – Data carrier identifiers (including symbology identifiers)
CDN $259.00 Add to cart -
ISO 2574:1994 Aircraft – Electrical cables – Identification marking
CDN $129.00 Add to cart
