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ISO 23420:2021

ISO 23420:2021 Microbeam analysis – Analytical electron microscopy – Method for the determination of energy resolution for electron energy loss spectrum analysis

CDN $307.00

SKU: 5dc39341235f Category:

Description

This document specifies a determination procedure of energy resolution in the scanning transmission electron microscope or the transmission electron microscope equipped with the electron energy loss (EEL) spectrometer.

This document is applicable to both in-column type EEL spectrometer and post-column type EEL spectrometer. These EEL signal detecting systems are applicable to a parallel detecting system and a serial detecting system.

Edition

1

Published Date

2021-04-23

Status

PUBLISHED

Pages

28

Language Detail Icon

English

Format Secure Icon

Secure PDF

Abstract

This document specifies a determination procedure of energy resolution in the scanning transmission electron microscope or the transmission electron microscope equipped with the electron energy loss (EEL) spectrometer.

This document is applicable to both in-column type EEL spectrometer and post-column type EEL spectrometer. These EEL signal detecting systems are applicable to a parallel detecting system and a serial detecting system.

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