ISO 11505:2025
ISO 11505:2025 Surface chemical analysis — General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
CDN $296.00
This publication was last reviewed and confirmed in 2025.
Surface chemical analysis — General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
Description
This document specifies a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.
The applicability of this document is limited to description of general procedures for quantification of the chemical composition and thickness in GD-OES compositional depth profiling. This document is not directly applicable for quantification of individual materials having various thicknesses and elements to be determined.
Edition
2
Published Date
2026-06-18
Status
PUBLISHED
Pages
34
Language
English
Format
Secure PDF
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Abstract
This document specifies a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.
The applicability of this document is limited to description of general procedures for quantification of the chemical composition and thickness in GD-OES compositional depth profiling. This document is not directly applicable for quantification of individual materials having various thicknesses and elements to be determined.
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